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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

A Microassembly Process to Realize Angular Vertical Comb Electrodes for a Gimbaled-less Electrostatic Scanner

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Author(s)
이종현
Type
Conference Paper
Citation
2012 IEEE 25th International Conference, pp.624 - 627
Issued Date
2012-01-29
Publisher
IEEE
Conference Place
FR
URI
https://scholar.gist.ac.kr/handle/local/23932
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