GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Design and construvtion of six-degree-of-freedom motion?error measurement system in a linear stage using angle?sensor-combined grating Interferometry
- Type
- Conference Paper
- Citation
- 12th International Conference of the European Society for Precision Enginnering & Nanotechnology, pp.76 - 79
- Issued Date
- 2012-06-06
- Publisher
- European Society for Precision Enginnering & Nanotechnology
- Conference Place
- SW
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
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