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Design and construvtion of six-degree-of-freedom motion?error measurement system in a linear stage using angle?sensor-combined grating Interferometry

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Author(s)
이선규
Type
Conference Paper
Citation
12th International Conference of the European Society for Precision Enginnering & Nanotechnology, pp.76 - 79
Issued Date
2012-06-06
Publisher
European Society for Precision Enginnering & Nanotechnology
Conference Place
SW
URI
https://scholar.gist.ac.kr/handle/local/23758
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