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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Application of PDMS as an Etch Mask for DRIE Process

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Author(s)
양성
Type
Conference Paper
Citation
ISMM 2012
Issued Date
2012-06-11
Publisher
ISMM
Conference Place
CH
URI
https://scholar.gist.ac.kr/handle/local/23750
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