OAK

Development and Control of XY Stage with a Hybrid Bolt Clamped Langevin Type Ultrasonic Motor

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Author(s)
이선규
Type
Conference Paper
Citation
ASPE : Precision Control for Advanced Manufacturing Systems
Issued Date
2013-04-21
Publisher
ASPE
Conference Place
US
URI
https://scholar.gist.ac.kr/handle/local/23323
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