Virtual Reality Visualization Tool for Semiconductor Devices

Abstract

Quite recently, a virtual reality (VR) visualization tool for atomic structures has been successfully developed [1]. In this work, the VR visualization tool is further extended to consider semiconductor devices. In contrast to atoms, which are described as spheres, the regions in the semiconductor device can have much more complicated shape. The structure file used in our in-house device simulator, G-Device [2,3], can be visualized by the newly developed VR visualization tool. It is expected that the VR visualization can be applied to various TCAD tools, such as topographical process simulators.