중적외선 초 해상도 이미징을 위한 박막형 실리콘 마이크로렌즈 어레이 설계 및 제작

Abstract

IR imaging which are useful for chemical imaging, bio-imaging, thermal imaging, has not been studied much near-focusing due to material limitations. Herein, we present on the design and fabrication schemes of microscale silicon solid immersion lenses (μ-SIL) based on thin-film geometry for mid-infrared (MIR) applications.