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Fabrication of flexible interdigit-shaped load cell based on parylene peel-off and parametric study for design optimization

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Author(s)
Yang, Sung
Type
Conference Paper
Citation
ISMM 2014
Issued Date
2014-06
Publisher
International Symposium on Microchemistry and Microsystems
Conference Place
UK
URI
https://scholar.gist.ac.kr/handle/local/22357
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