Fabrication of 1D SnO2 Nanorod(NR) using the Glancing Angle Deposition(GAD) method for high performance gas sensor

Abstract

Recently, high performance gas sensors are inevitable because of the era of Internet on Things (IoT) which needs high demands of detection about the leakage of hazardous gases. As increasing demands, many studies for improving the performance of gas sensing have been intensively conducted. Generally, semiconductor materials used for gas sensing have diverse morphologies such as nanoparticles, nanowires, nanofibers, nanosheets, nanoflowers, and so on. However, it is still difficult to meet the higher level of Limit of Detections (LOD) due to lack of porosity. To date, 1-Dimensional (1D) metal oxide nanostructures fabricated through glancing angle deposition (GAD) method have been widely studied to increase the surface to volume ratio which is related to high porosity for better sensing performance. When the structure obtains high surface to volume ratio, it could absorb more gas molecules and also accelerate the charge accumulation which results in improving the sensitivity and response velocity. In this study, we enhanced sensing properties of SnO2 nanorods (NRs) array which was fabricated via glancing angle deposition method for detecting specific gas in air. Compare to conventional SnO2 nanosheets (NSs), SnO2 NRs sensor showed higher performance with the fast response time and appreciable stability to gases. SnO2 NRs induced the larger surface area for increasing exposed active sites to gases.