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Subwavelength Structures on Glass and GaN Substrates by Self-Masked Dry Etch Process for Advanced Optical Devices

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Author(s)
SONG, YOUNG MIN
Type
Conference Paper
Citation
MNC 2014
Issued Date
2014-11-06
Publisher
JJAP
Conference Place
JA
URI
https://scholar.gist.ac.kr/handle/local/21638
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