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GIST Repository College of Information and Computing Department of Electrical Engineering and Computer Science 2. Conference Papers

Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics

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Author(s)
Eslami, S.; Gibbs, J. G.; Mark, A. G.; Lee, T. C.; Jeong, H. H.; Kim, I.; Fischer, P.
Type
Conference Paper
Citation
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Issued Date
2015-02-09
Abstract
We describe how physical vapor deposition coupled with micelle-nanolithography-seeded substrates permits the growth of metamaterials with 3D structural and material control at the nanoscale. Novel plasmonic hybrid structures with tuned optical response from the UV to the near IR are demonstrated.
Publisher
SPIE
Conference Place
US
San Francisco, California
URI
https://scholar.gist.ac.kr/handle/local/21502
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