Control of XY stage using ultrasonic linear motor for continuos motion
- Author(s)
- LEE, SUN KYU
- Type
- Conference Paper
- Citation
- ICMDT (International Conference on Manufacturing, Machine Design and Tribology)
- Issued Date
- 2015-04
- Publisher
- JSME (The Japan Society of Mechanical Engineers) & KSME (The Korean Society of Mechanical Engineers)
- Conference Place
- JA
오키나와, 일본
- URI
- https://scholar.gist.ac.kr/handle/local/21476
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