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Control of XY stage using ultrasonic linear motor for continuos motion

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Author(s)
LEE, SUN KYU
Type
Conference Paper
Citation
ICMDT (International Conference on Manufacturing, Machine Design and Tribology)
Issued Date
2015-04
Publisher
JSME (The Japan Society of Mechanical Engineers) & KSME (The Korean Society of Mechanical Engineers)
Conference Place
JA
오키나와, 일본
URI
https://scholar.gist.ac.kr/handle/local/21476
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