GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
원자현미경의 Z축 나노스테이지 비선형성 제거를 위한 연구
- Alternative Title
- Research for Nonlinearity elimination of the Z axis nanostage of the Atomic Force Microscope
- Issued Date
- 2015-11-10
- Type
- Conference Paper
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 동역학 및 제어부문 2015년도 추계학술대회, pp.3661 - 3662
- Conference Place
- KO
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
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