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Parametric study of improved herringbone structure for regulating position of particles

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Author(s)
Yu-gyung JungJi-chul HyunYang, Sung
Type
Conference Paper
Citation
KMEMS 2016, pp.435 - 436
Issued Date
2016-04-09
Publisher
마이크로나노시스템학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/20705
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