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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Precise motion control of XY stage system using ultrasonic motor in a vacuum environment

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Author(s)
Lee, Sun-Kyu; 이동진; 김유영
Type
Conference Paper
Citation
ULTRASONICS 2016
Issued Date
2016-06-07
Publisher
ULTRASONICS 2016
Conference Place
PO
URI
https://scholar.gist.ac.kr/handle/local/20639
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