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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases

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Author(s)
Lee, Jaekwon; Lee, Sang-Jin; Moon, Seunghwan; Park, Yangkyu; Kim, Kwanghyun; Lee, Jong-Hyun
Type
Conference Paper
Citation
22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Issued Date
2017-08
Abstract
A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.
Publisher
IEEE Computer Society
Conference Place
US
URI
https://scholar.gist.ac.kr/handle/local/20248
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