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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases

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Abstract
A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.
Author(s)
Lee, Jaekwon; Lee, Sang-Jin; Moon, Seunghwan; Park, Yangkyu; Kim, Kwanghyun; Lee, Jong-Hyun
Issued Date
2017-08
Type
Conference Paper
DOI
10.1109/OMN.2017.8051466
URI
https://scholar.gist.ac.kr/handle/local/20248
Publisher
IEEE Computer Society
Citation
22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
ISSN
2160-5033
Conference Place
US
Appears in Collections:
Department of Mechanical and Robotics Engineering > 2. Conference Papers
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