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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Feasibility study of the OCT probe using MEMS optical scanner array for high speed inspection

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Author(s)
Kim, Kwanghyun; Moon, Seunghwan; Lee, Jaekwon; Park, Yangkyu; Lee, Sang-Jin; Lee, Jong-Hyun
Type
Conference Paper
Citation
22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Issued Date
2017-08
Abstract
We developed a microscanner-based optical coherence tomography probe for the 3-dimensional inspection of display panels, which will be extended to arrayed scanners to enhance inspection speed. The scanning range and beam diameter were 13.1 mm and 84.5 μm, respectively.
Publisher
IEEE Computer Society
Conference Place
US
URI
https://scholar.gist.ac.kr/handle/local/20246
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