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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Feasibility study of the OCT probe using MEMS optical scanner array for high speed inspection

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Abstract
We developed a microscanner-based optical coherence tomography probe for the 3-dimensional inspection of display panels, which will be extended to arrayed scanners to enhance inspection speed. The scanning range and beam diameter were 13.1 mm and 84.5 μm, respectively.
Author(s)
Kim, Kwanghyun; Moon, Seunghwan; Lee, Jaekwon; Park, Yangkyu; Lee, Sang-Jin; Lee, Jong-Hyun
Issued Date
2017-08
Type
Conference Paper
DOI
10.1109/OMN.2017.8051481
URI
https://scholar.gist.ac.kr/handle/local/20246
Publisher
IEEE Computer Society
Citation
22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
ISSN
2160-5033
Conference Place
US
Appears in Collections:
Department of Mechanical and Robotics Engineering > 2. Conference Papers
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