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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Two-axis quasistatic gimbal-less microscanner with concentrically tilted stationary comb electrodes

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Author(s)
Moon, Seunghwan; Lee, Jaekwon; Park, Yangkyu; Kim, Kwanghyun; Lee, Sang-Jin; Lee, Jong-Hyun
Type
Conference Paper
Citation
22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Issued Date
2017-08
Abstract
Two-axis quasistatic gimbal-less microscanners were fabricated through the microassembly of a glass lid and stationary comb electrodes. The total optical scan angles were enlarged to 5.2° and 5.8° for horizontal and vertical scan axes, respectively.
Publisher
IEEE Computer Society
Conference Place
US
URI
https://scholar.gist.ac.kr/handle/local/20245
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