GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Two-axis quasistatic gimbal-less microscanner with concentrically tilted stationary comb electrodes
- Type
- Conference Paper
- Citation
- 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
- Issued Date
- 2017-08
- Abstract
- Two-axis quasistatic gimbal-less microscanners were fabricated through the microassembly of a glass lid and stationary comb electrodes. The total optical scan angles were enlarged to 5.2° and 5.8° for horizontal and vertical scan axes, respectively.
- Publisher
- IEEE Computer Society
- Conference Place
- US
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
- 파일 목록
-
-
관련 파일이 존재하지 않습니다.
-
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.