GIST Scholar
College of Artificial Intelligence
Department of Electrical Engineering and Computer Science
2. Conference Papers
Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation
- Type
- Conference Paper
- Citation
- 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
- Issued Date
- 2017-08-13
- Abstract
- We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.
- Publisher
- IEEE Computer Society
- Conference Place
- US
Santa Fe
- Appears in Collections:
- Department of Electrical Engineering and Computer Science > 2. Conference Papers
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