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128x128 silicon photonic MEMS switch with scalable row/column addressing

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Abstract
128x128 silicon photonic switch with 16,384 MEMS-actuated switching elements and row/column addressing scheme have been successfully integrated on a 16x17mm
Author(s)
Kwon, KyungmokSeok, Tae JoonHenriksson, JohannesLuo, JianhengOchikubo, LaneJacobs, JohnMuller, Richard S.Wu, Ming C.
Issued Date
2018-05
Type
Conference Paper
DOI
10.1364/CLEO_SI.2018.SF1A.4
URI
https://scholar.gist.ac.kr/handle/local/19933
Publisher
OSA - The Optical Society
Citation
CLEO: Science and Innovations, CLEO_SI 2018
Conference Place
US
Appears in Collections:
Department of Electrical Engineering and Computer Science > 2. Conference Papers
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