Thin film SnO2-based gas sensors: Film thickness influence

Abstract

The influence of the thickness of SnO2 films deposited by a spray pyrolysis method on the operating characteristics of gas sensors is analyzed in this paper. It outlines how the thickness of metal oxides is an important parameter for gas sensors in determining the main operating parameters, such as the magnitude and rate of the sensor response and the optimal operating temperature. It is also shown that the optimal film thickness of a gas sensing layer depends on the required sensor parameters. (C) 2009 Elsevier B. V. All rights reserved.