The Role of the Film Thickness in Sensor Response of the SnO2-Based Devices

Abstract

The influence of metal oxide thickness on operating characteristics of the SnO2-based thin film gas sensors is analyzed in this paper. It is shown that the thickness of metal oxides is an important parameter of gas sensors, which determines main operating characteristics, including ones such as magnitude and rate of sensor response, operating temperature, and stability. The nature of effects controlling operating characteristics of the thin film sensors with different thickness is discussed as well.