Printing of Sub-100-nm Metal Nanodot Arrays by Carbon Nanopost Stamps

Abstract

This work reports an efficient method to fabricate hexagonally patterned metal nanodot arrays at the sub-100-nm scale, which is based on contact printing via novel nanometer-scaled stamps. Vertically aligned carbon nanoposts, supported by hexagonally ordered nanochannels of anodic aluminum oxide templates, are employed as the stamping platform to directly transfer controlled metal nanodot arrays. Using the fabrication platform, a number of patterned metal nanodot arrays made of Au, Cu, Ni, Ag, Pt, Al, and Ti can be contact-printed over large substrate areas in ambient conditions. The size, density, and interdistance of the printed nanodots are controllable with a tight correspondence to the mother stamp geometries, which can be precisely tuned by modifying the pore dimensions of the alumina matrixes. An advanced example of contact printing of metal nanoparticles is successfully demonstrated by the controlled formation of nanodot arrays in a specific area.