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Highly tolerant a-Si distributed Bragg reflector fabricated by oblique angle deposition

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Author(s)
Jang, Sung Jun; Song, Young Min; Yeo, Chan Il; Park, Chang Young; Lee, Yong Tak
Type
Article
Citation
Optical Materials Express, v.1, no.3, pp.451 - 457
Issued Date
2011-07
Abstract
We demonstrate a highly tolerant and highly reflective broadband a-Si distributed Bragg reflector fabricated by oblique angle deposition. By tuning the refractive index of an a-Si film, a high index contrast material system was achieved. The highly tolerant and broadband reflective characteristics of the a-Si distributed Bragg reflector were investigated by calculation and fabrication. A broad stop band (Delta lambda/lambda = 33.7%, R>99%) with only a five-pair a-Si distributed Bragg reflector was achieved experimentally. The size-, feature- and substrate-independent method for highly reflective Bragg reflectors was realized by simple oblique angle evaporation. (C) 2011 Optical Society of America
Publisher
Optical Society of America
ISSN
2159-3930
DOI
10.1364/OME.1.000451
URI
https://scholar.gist.ac.kr/handle/local/16259
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