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Simultaneous Measurements of Refractive Index and Thickness by Spectral-Domain Low Coherence Interferometry Having Dual Sample Probes

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Author(s)
Park, Seong Jun; Park, Kwan Seob; Kim, Young Ho; Lee, Byeong Ha
Type
Article
Citation
IEEE Photonics Technology Letters, v.23, no.15, pp.1076 - 1078
Issued Date
2011-08
Abstract
We propose and demonstrate the novel method that enables simultaneous measurements of physical thickness and refractive group index without any prior knowledge on samples. The system is based on the spectral-domain optical low coherence interferometry with two sample probes facing each other. Owing to both side measurements schemes, thickness and group refractive index could be measured with not only transparent but also highly absorptive samples. The average errors were similar to 0.06% in both the physical thickness and the group refractive index measurements.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
ISSN
1041-1135
DOI
10.1109/LPT.2011.2155642
URI
https://scholar.gist.ac.kr/handle/local/16233
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