Electron density characterization of inductively-coupled argon plasmas by the terahertz time-domain spectroscopy

Abstract

Inductively-coupled plasmas (ICP) in the high electron density regime of the order of 1013 cm-3 are generated and their electron density characteristics are investigated by the terahertz time-domain spectroscopy (THz-TDS) method. In this experiment, the plasma was produced by RF (13.56 MHz) with an applied RF power of 300-550 W and the argon gas pressure was in the range of 0.3-1.1 Torr. We generated the THz wave by focusing a femtosecond laser pulse in air with a DC electric field. As a plasma diagnostic tool, the THz-TDS method is found to successfully provide the plasma density information in the high-density regime, where other available plasma diagnostic tools are very limited. In addition, the analytical model based on the ambipolar diffusion equation is compared with experimental observations to explain the behavior of the electron density in the ICP source, where the plasma density is shown to be related to the applied RF power and gas pressure. The analytical result from the model is found to be in good agreement with the THz-TDS result. © 2016 IOP Publishing Ltd.