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Single-Material Bragg Reflectors and Their Applications in VCSELs

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Author(s)
Choi, Hee Ju; Ju, Gun Wu; Song, Young Min; Lee, Yong Tak
Type
Article
Citation
Journal of the Korean Physical Society, v.72, no.2, pp.197 - 200
Issued Date
2018-01
Abstract
We present single-material distributed Bragg reflectors (DBRs) fabricated by oblique-angle deposition of amorphous silicon (a-Si). The high and low refractive indices of a-Si films were obtained at two incident vapour flux angles (theta(alpha)) of 0 degrees and 80 degrees by determining the quarter-wavelength thicknesses of 67 nm at 0 degrees and 128 nm at 80 degrees. The fabricated single-material Bragg reflectors with only five pairs provide high reflectivity values of over 95%. The proposed DBRs were applied to intra-cavity contacted vertical-cavity surface-emitting lasers (VCSELs) to reduce fabrication costs and step. For the fabricated five pair a-Si/a-Si DBRs on VCSELs, the normalized stop bandwidth of 31.63% was measured while high reflectivity values over 95% were maintained over a wide wavelength range of 710 - 1020 nm. The fabricated VCSELs with D-a = 7 mu m obtained output power and threshold current, which are reasonable measured results.
Publisher
한국물리학회
ISSN
0374-4884
DOI
10.3938/jkps.72.197
URI
https://scholar.gist.ac.kr/handle/local/13453
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