In2O3- and SnO2-based Ozone Sensors: Design and Characterization

Abstract

This article describes in detail the SnO2 and In2O3 metal oxides as materials for designing solid state conductometric ozone sensors. The main focus of this article is on the description of the SnO2 and In2O3 films’ structural parameters important for gas sensor design and on the establishment of the main regularities of the film parameters influence on the sensor characteristics. Advantages and disadvantages of approaches used for optimization of ozone sensor parameters are also analyzed. In particular, surface modification, bulk doping of SnO2 and In2O3, and the use of 1D structures and hybrid materials are considered. The main factors, controlling parameters of SnO2- and In2O3-based ozone sensors, are determined, and recommendations for the process of the SnO2 and In2O3 films deposition, facilitating the search of the film parameters and the fabrication technologies that optimize the ozone sensor performance, are formulated.