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Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

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Author(s)
Kim, Hyun Myung; Lee, Gil Ju; Kim, Min Seok; Song, Young Min
Type
Article
Citation
Journal of Visualized Experiments, no.136
Issued Date
2018-06
Abstract
Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, but several challenging points remain, such as a low absorption efficiency due to a thin active layer and low flexibility. We present an advanced method to fabricate a flexible phototransistor array with an improved electrical performance. The outstanding electrical performance is driven by a low dark current owing to deep impurity doping. Stretchable and flexible metal interconnectors simultaneously offer electrical and mechanical stabilities in a highly deformed state. The protocol explicitly describes the fabrication process of the phototransistor using a thin silicon membrane. By measuring I-V characteristics of the completed device in deformed states, we demonstrate that this approach improves the mechanical and electrical stabilities of the phototransistor array. We expect that this approach to a flexible phototransistor can be widely used for the applications of not only next-generation imaging systems/optoelectronics but also wearable devices such as tactile/pressure/temperature sensors and health monitors. © 2018, Journal of Visualized Experiments. All rights reserved.
Publisher
MYJoVE Corporation
ISSN
1940-087X
DOI
10.3791/57502
URI
https://scholar.gist.ac.kr/handle/local/13216
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