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Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

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Author(s)
Kim, YeonginSuh, Jun MinShin, JihoLiu, YunpengYeon, HanwoolQiao, KuanKum, Hyun S.Kim, ChansooLee, Han EolChoi, ChanyeolKim, HyunseokLee, DoyoonLee, JaeyongKang, Ji-HoonPark, Bo-InKang, SungsuKim, JihoonKim, SungkyuPerozek, Joshua A.Wang, KejiaPark, YongmoKishen, KumarKong, LingpingPalacios, TomásPark, JungwonPark, Min-ChulKim, Hyung-junLee, Yun SeogLee, KyusangBae, Sang-HoonKong, WeiHan, JiyeonKim, Jeehwan
Type
Article
Citation
Science, v.377, no.6608, pp.859 - 864
Issued Date
2022-08
Abstract
Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chipless wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave-based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.
Publisher
American Association for the Advancement of Science (AAAS)
ISSN
0036-8075
DOI
10.1126/science.abn7325
URI
https://scholar.gist.ac.kr/handle/local/10664
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